Semiconductor Physics and Micron-Scale Fluid Mechanics towards the Microelectromechanical Systems associated with Nanotechnology
Keywords:
Semiconductor, nanotechnology, microfluidics, microchannel bends, nanofluidicsAbstract
Interrelations among semiconductor physics, microfluidics, nanofluidics and nanotechnology are briefly described. A single microchannel bend is designed and fabricated by author using the maskless lithography, hot embossing lithography and direct bonding. Dyed water is the selected and prepared working liquid in this work. Surface-driven (passive) capillary flow of working liquid is recorded in the fabricated microchannel bend using a CMOS camera. This work may be useful in applied chemistry.References
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